Pergunta de entrevista da empresa Lam Research
How would you increase anisotropy during an etch process?
Respostas da entrevista
Sigiloso
14 de nov. de 2016
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.
How would you increase anisotropy during an etch process?
Sigiloso
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.