Pergunta de entrevista da empresa Lam Research
How would you solve an undercut issue when etching silicon with top hard mask?
Resposta da entrevista
Sigiloso
15 de out. de 2012
Use passivation gas at the initial stage of etch
How would you solve an undercut issue when etching silicon with top hard mask?
Sigiloso
Use passivation gas at the initial stage of etch